Integrated crystalline silicon and silicon nitride photonic devices on plastic substrates

Yu Chen, Mo Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Fully integrated photonic devices based on single-crystal silicon and silicon nitride including ring resonators and grating couplers have been successfully transferred to flexible plastic substrate with one hundred percent yield and uncompromised performance.

Original languageEnglish (US)
Title of host publication2014 Conference on Lasers and Electro-Optics, CLEO 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Volume2014-January
StatePublished - Jan 1 2014
Event2014 Conference on Lasers and Electro-Optics, CLEO 2014 - San Jose, United States
Duration: Jun 8 2014Jun 13 2014

Other

Other2014 Conference on Lasers and Electro-Optics, CLEO 2014
CountryUnited States
CitySan Jose
Period6/8/146/13/14

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