"Incompressible" pore effect on the mechanical behavior of low-K dielectric films

Keyphrases

• Mechanical Behavior 100%
• Dielectric Constant 100%
• Pore Effect 100%
• Dielectric Film 100%
• Mechanical Properties 66%
• Nanometer Size 66%
• Hardness Ratio 66%
• Indenter 33%
• Nanoindentation 33%
• Material Development 33%
• Porosity 33%
• Fracture Toughness 33%
• Elastic Deformation 33%
• Energy Contribution 33%
• Pore Size 33%
• Hysteresis 33%
• Nanometre 33%
• Yield Stress 33%
• Constant Modulus 33%
• High Surface Energy 33%
• Stress Increment 33%
• Load-displacement Curve 33%
• Current Analysis 33%
• Indentation Depth 33%
• Power Load 33%
• Size Particle 33%
• Hall-Petch Effect 33%
• Load Dependence 33%

Engineering

• Nanometre 100%
• Dielectrics 100%
• Dielectric Films 100%
• Porosity 66%
• Material Development 33%
• Constant Modulus 33%
• Load Displacement Curve 33%
• Indentation 33%
• Material Constant 33%
• Load Power 33%
• Elastic Deformation 33%
• Thin Films 33%
• Petch Effect 33%
• Interfacial Energy 33%
• Fracture Strength 33%
• Yield Point 33%

Material Science

• Permittivity 100%
• Dielectric Films 100%
• Low-K Dielectric 100%
• Pore Size 66%
• Nanoindentation 33%
• Fracture Toughness 33%
• Surface Energy 33%
• Indentation 33%
• Elastic Deformation 33%
• Yield Stress 33%
• Thin Films 33%