In situ formation of superconducting YBa2Cu3O 7-x thin films using pure ozone vapor oxidation

D. D. Berkley, B. R. Johnson, N. Anand, K. M. Beauchamp, L. E. Conroy, A. M. Goldman, J. Maps, K. Mauersberger, M. L. Mecartney, J. Morton, M. Tuominen, Y. J. Zhang

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Abstract

Superconducting YBa2Cu3O7- x thin films have been prepared by coevaporation using an ozone vapor jet as an oxygen source. Films exhibiting zero resistance at 82 K have been fabricated in situ under high vacuum conditions using substrate temperatures of 700°C without a post-evaporation anneal in oxygen. This process has implications for in situ measurements of fully superconducting surfaces using a variety of probes as well as for the fabrication of devices and structures whose properties are dependent on surfaces and interfaces.

Original languageEnglish (US)
Pages (from-to)1973-1975
Number of pages3
JournalApplied Physics Letters
Volume53
Issue number20
DOIs
StatePublished - 1988

Bibliographical note

Copyright:
Copyright 2007 Elsevier B.V., All rights reserved.

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