Abstract
In situ epitaxial growth of ordered FePt thin films with small and uniform grain size using RuAl underlayer is reported. A transmission electron microscopy image of a 20-nm RuAl layer deposited on a glass substrate revealed small (D~5.0 nm) and uniform (ΔDD~15%) grains. The (001) texture was formed in RuAl films at a substrate temperature higher than 100°C. The FePt L10 (001) texture with mean grain size of 6.63 nm and narrow size distribution (17%) has been successfully induced using a RuAl underlayer at a substrate temperature of 400°C. The influences of the RuAl composition ratio and Pt interlayer were studied.
Original language | English (US) |
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Article number | 10H301 |
Journal | Journal of Applied Physics |
Volume | 97 |
Issue number | 10 |
DOIs | |
State | Published - May 15 2005 |
Bibliographical note
Funding Information:The support from INSIC EHDR program and Heraeus Inc. is gratefully acknowledged.
Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.