In situ epitaxial growth of ordered FePt (001) films with ultra small and uniform grain size using a RuAl underlayer

W. K. Shen, J. H. Judy, Jian Ping Wang

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Abstract

In situ epitaxial growth of ordered FePt thin films with small and uniform grain size using RuAl underlayer is reported. A transmission electron microscopy image of a 20-nm RuAl layer deposited on a glass substrate revealed small (D~5.0 nm) and uniform (ΔDD~15%) grains. The (001) texture was formed in RuAl films at a substrate temperature higher than 100°C. The FePt L10 (001) texture with mean grain size of 6.63 nm and narrow size distribution (17%) has been successfully induced using a RuAl underlayer at a substrate temperature of 400°C. The influences of the RuAl composition ratio and Pt interlayer were studied.

Original languageEnglish (US)
Article number10H301
JournalJournal of Applied Physics
Volume97
Issue number10
DOIs
StatePublished - May 15 2005

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