In-plane magnetic anisotropy in RF sputtered Fe-N thin films

H. B. Nie; S. Y. Xu; C. K. Ong; Q. Zhan; D. X. Li; J. P. Wang

doi:10.1016/S0040-6090(03)00833-2

In-plane magnetic anisotropy in RF sputtered Fe-N thin films

H. B. Nie, S. Y. Xu, C. K. Ong, Q. Zhan, D. X. Li, J. P. Wang

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

We have fabricated Fe(N) thin films with varied N₂ partial pressure and studied the microstructure, morphology, magnetic properties and resistivity by using X-ray diffraction, atomic force microscopy, transmission electron microscopy, vibrating-sample magnetometer and angle-resolved M-H hysteresis Loop tracer and standard four-point probe method. In the presence of low N₂ partial pressure, Fe(N) films showed a basic bcc α-Fe structure with a preferred (110) texture. A variation of in-plane magnetic anisotropy of the Fe(N) films was observed with the changing of N component. The evolution of in-plane anisotropy in the films was attributed to the directional order mechanism. Nitrogen atoms play an important role in refining the α-Fe grains and inducing uniaxial anisotropy.

Original language	English (US)
Pages (from-to)	35-40
Number of pages	6
Journal	Thin Solid Films
Volume	440
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(03)00833-2
State	Published - Sep 1 2003

Keywords

Directional order
Iron
Magnetic anisotropy
Nitrides

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10.1016/S0040-6090(03)00833-2

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title = "In-plane magnetic anisotropy in RF sputtered Fe-N thin films",

abstract = "We have fabricated Fe(N) thin films with varied N2 partial pressure and studied the microstructure, morphology, magnetic properties and resistivity by using X-ray diffraction, atomic force microscopy, transmission electron microscopy, vibrating-sample magnetometer and angle-resolved M-H hysteresis Loop tracer and standard four-point probe method. In the presence of low N2 partial pressure, Fe(N) films showed a basic bcc α-Fe structure with a preferred (110) texture. A variation of in-plane magnetic anisotropy of the Fe(N) films was observed with the changing of N component. The evolution of in-plane anisotropy in the films was attributed to the directional order mechanism. Nitrogen atoms play an important role in refining the α-Fe grains and inducing uniaxial anisotropy.",

keywords = "Directional order, Iron, Magnetic anisotropy, Nitrides",

author = "Nie, {H. B.} and Xu, {S. Y.} and Ong, {C. K.} and Q. Zhan and Li, {D. X.} and Wang, {J. P.}",

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T1 - In-plane magnetic anisotropy in RF sputtered Fe-N thin films

AU - Nie, H. B.

AU - Xu, S. Y.

AU - Ong, C. K.

AU - Zhan, Q.

AU - Li, D. X.

AU - Wang, J. P.

PY - 2003/9/1

Y1 - 2003/9/1

N2 - We have fabricated Fe(N) thin films with varied N2 partial pressure and studied the microstructure, morphology, magnetic properties and resistivity by using X-ray diffraction, atomic force microscopy, transmission electron microscopy, vibrating-sample magnetometer and angle-resolved M-H hysteresis Loop tracer and standard four-point probe method. In the presence of low N2 partial pressure, Fe(N) films showed a basic bcc α-Fe structure with a preferred (110) texture. A variation of in-plane magnetic anisotropy of the Fe(N) films was observed with the changing of N component. The evolution of in-plane anisotropy in the films was attributed to the directional order mechanism. Nitrogen atoms play an important role in refining the α-Fe grains and inducing uniaxial anisotropy.

AB - We have fabricated Fe(N) thin films with varied N2 partial pressure and studied the microstructure, morphology, magnetic properties and resistivity by using X-ray diffraction, atomic force microscopy, transmission electron microscopy, vibrating-sample magnetometer and angle-resolved M-H hysteresis Loop tracer and standard four-point probe method. In the presence of low N2 partial pressure, Fe(N) films showed a basic bcc α-Fe structure with a preferred (110) texture. A variation of in-plane magnetic anisotropy of the Fe(N) films was observed with the changing of N component. The evolution of in-plane anisotropy in the films was attributed to the directional order mechanism. Nitrogen atoms play an important role in refining the α-Fe grains and inducing uniaxial anisotropy.

KW - Directional order

KW - Iron

KW - Magnetic anisotropy

KW - Nitrides

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