Impact of Self-heating on Performance and Reliability in FinFET and GAAFET Designs

Keyphrases

• 7-nm FinFET 16%
• Accelerated Aging 16%
• Bias Temperature Instability 33%
• Circuit Performance 16%
• Delayed Degradation 16%
• Electromigration 33%
• Excessive Heat 16%
• Failure Time 16%
• Fin Field-effect Transistor (FinFET) 100%
• Gate-all-around 100%
• Heat Confinement 16%
• Hot Carrier Injection 33%
• Logic Gates 16%
• Self-heating 100%
• SOI FinFET 33%
• Speed Increase 16%
• Substructure 16%
• Three-dimensional Geometry 16%
• Transistor 16%

Engineering

• Circuit Performance 16%
• Dimensional Geometry 16%
• Electromigration 33%
• Field Effect Transistors 100%
• Hot Carrier Injection 33%
• Logic Gate 16%
• Reduce Speed 16%