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Dive into the research topics of 'Imaging micro-spectrometer with space-variant adaptive dispersion incorporating a MEMS mirror array'. Together they form a unique fingerprint.
Mathematics
Micro-electro-mechanical Systems
Mirror
Imaging
Gratings
Linear Array
Optics
Pixel
Wavelength
Fused Silica
Electron Beam Lithography
Photomask
Photolithography
Photoresist
Spectral Resolution
Tilt
Fabrication
Laser
Tilting
Design
High Energy
Diffraction
Vary
Testing
Object
Necessary
Range of data
Performance
Standards
Engineering & Materials Science
Spectrometers
Mirrors
MEMS
Imaging techniques
Optics
Wavelength
Gas discharge tubes
Diffraction gratings
Electron beam lithography
Pixels
Spectral resolution
Photomasks
Fused silica
Photoresists
Photolithography
Diffraction
Lasers
Fabrication
Geometry
Testing
Chemical Compounds
Spectrometers
Mirrors
MEMS
Imaging techniques
Optics
Wavelength
Gas discharge tubes
Diffraction gratings
Electron beam lithography
Pixels
Photomasks
Fused silica
Photoresists
Photolithography
Diffraction
Lasers
Geometry
Testing
Physics & Astronomy
microelectromechanical systems
spectrometers
mirrors
linear arrays
gratings
pixels
optics
photomasks
gas discharge tubes
photolithography
photoresists
spectral resolution
wavelengths
slits
lithography
silicon dioxide
electron beams
fabrication
geometry
diffraction
performance
lasers