Imaging ellipsometry for high-spatial-resolution metrology

Keyphrases

• Aperture Lens 50%
• Diffraction 50%
• Diffraction Model 50%
• High numerical Aperture 50%
• High Spatial Resolution 100%
• Imaging Ellipsometer 100%
• Imaging Ellipsometry 100%
• Measurement Capability 50%
• Metrology 100%
• Metrology Tool 50%
• Novel Imaging 50%
• Polarization Change 50%
• Semiconductor Industry 50%
• Subwavelength 100%
• Surface Map 50%
• Two-dimensional Surface 50%
• Vector-based 50%
• Wavelength Measurement 50%

Earth and Planetary Sciences

• Ellipsometers 100%
• Ellipsometry 100%
• High Spatial Resolution 100%
• Numerical Aperture 50%
• Semiconductor Industry 50%