Original language | English (US) |
---|---|
Pages (from-to) | 1847 |
Number of pages | 1 |
Journal | IEEE Transactions on Electron Devices |
Volume | 33 |
Issue number | 11 |
DOIs | |
State | Published - Nov 1986 |
IIIB-2 The Fabrication Submicrometer MOSFET's using Laser Doping
P. G. Carey, K. Bezjian, T. W. Simon, T. Magee, P. Gildea
Research output: Contribution to journal › Article › peer-review