IIIB-2 The Fabrication Submicrometer MOSFET's using Laser Doping

P. G. Carey, K. Bezjian, T. W. Simon, T. Magee, P. Gildea

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Number of pages1
JournalIEEE Transactions on Electron Devices
Volume33
Issue number11
DOIs
StatePublished - Nov 1986

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