Hypersonic plasma particle deposition of nanostructured silicon and silicon carbide

N. P. Rao, N. Tymiak, J. Blum, A. Neuman, H. J. Lee, S. L. Girshick, P. H. McMurry, J. Heberlein

Research output: Contribution to journalArticlepeer-review

110 Scopus citations

Fingerprint

Dive into the research topics of 'Hypersonic plasma particle deposition of nanostructured silicon and silicon carbide'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering

Physics

Chemical Engineering