Hypersonic plasma particle deposition of nanostructured coatings and micropatterns

J. Hafiz, R. Mukherjee, X. Wang, W. Mook, J. V.R. Heberlein, P. H. McMurry, W. W. Gerberich, S. L. Girshick

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications
PublisherAmerican Society of Mechanical Engineers
Pages101-102
Number of pages2
ISBN (Print)0791841774, 9780791841778
DOIs
StatePublished - Jan 1 2004
Event3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications - Pasadena, CA, United States
Duration: Sep 22 2004Sep 24 2004

Publication series

NameProceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications

Other

Other3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications
CountryUnited States
CityPasadena, CA
Period9/22/049/24/04

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  • Cite this

    Hafiz, J., Mukherjee, R., Wang, X., Mook, W., Heberlein, J. V. R., McMurry, P. H., Gerberich, W. W., & Girshick, S. L. (2004). Hypersonic plasma particle deposition of nanostructured coatings and micropatterns. In Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications (pp. 101-102). [NANO2004-46029] (Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications). American Society of Mechanical Engineers. https://doi.org/10.1115/nano2004-46029