@inproceedings{5873ebcde7514b098516dc492b10cc59,
title = "Hypersonic plasma particle deposition of nanostructured coatings and micropatterns",
author = "J. Hafiz and R. Mukherjee and X. Wang and W. Mook and Heberlein, {J. V.R.} and McMurry, {P. H.} and Gerberich, {W. W.} and Girshick, {S. L.}",
year = "2004",
doi = "10.1115/nano2004-46029",
language = "English (US)",
isbn = "0791841774",
series = "Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications",
publisher = "American Society of Mechanical Engineers",
pages = "101--102",
booktitle = "Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications",
note = "3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications ; Conference date: 22-09-2004 Through 24-09-2004",
}