Hydrogenated Amorphous Silicon Thin Films with Nanocrystalline Silicon Inclusions

T. J. Belich, S. Thompson, C. R. Perrey, U. Kortshagen, C. B. Carter, J. Kakalios

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Thin films of hydrogenated amorphous silicon containing nanocrystalline silicon inclusions (a/nc-Si:H) have been synthesized in an RF capacitively coupled PECVD system using a mixture of hydrogen diluted silane and helium, under deposition conditions at the edge of powder formation within the plasma. High resolution TEM confirms the presence of nanocrystallites as small as 2 nm in these films. Measurements of the optical absorption spectrum using CPM and PDS indicates a broadening of the Urbach slope in the a/nc-Si:H, compared to a-Si:H films, but no appreciable increase in midgap absorption. Despite the deposition conditions for the a/nc-Si:H being very different from those associated with producing optimal quality a-Si:H, the dark conductivity and photoconductivity values, and the sensitivity to light-induced defect creation in the a/nc-Si:H films are comparable to those in a-Si:H.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsJ.R. Abelson, G. Ganguly, H. Matsumura, J. Robertson, E.A. Schiff
Pages509-514
Number of pages6
Volume762
StatePublished - 2003
EventMaterials Research Proceedings: Amorphous and Nanocrystalline Silicon-Based Films - 2003 - San Francisco, CA, United States
Duration: Apr 22 2003Apr 25 2003

Other

OtherMaterials Research Proceedings: Amorphous and Nanocrystalline Silicon-Based Films - 2003
CountryUnited States
CitySan Francisco, CA
Period4/22/034/25/03

Fingerprint Dive into the research topics of 'Hydrogenated Amorphous Silicon Thin Films with Nanocrystalline Silicon Inclusions'. Together they form a unique fingerprint.

  • Cite this

    Belich, T. J., Thompson, S., Perrey, C. R., Kortshagen, U., Carter, C. B., & Kakalios, J. (2003). Hydrogenated Amorphous Silicon Thin Films with Nanocrystalline Silicon Inclusions. In J. R. Abelson, G. Ganguly, H. Matsumura, J. Robertson, & E. A. Schiff (Eds.), Materials Research Society Symposium - Proceedings (Vol. 762, pp. 509-514)