Hybrid method of moments to predict nanoparticle nucleation, growth and charging in dusty plasmas

Sai R. Narayanan; Suo Yang; Steven L. Girshick

doi:10.2514/6.2020-2156

Hybrid method of moments to predict nanoparticle nucleation, growth and charging in dusty plasmas

Sai R. Narayanan
, Suo Yang
, Steven L. Girshick

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

A 1D numerical model has been developed for a capacitively-coupled RF parallel plate argon-silane dusty plasma. The Hybrid Method of Moments has been used to solve the aerosol population balance equations. The aerosol module is self consistently coupled with a plasma module. This simplified model treats the nucleation and surface growth rates as input parameters. Operating conditions include 13.56 MHz frequency, applied RF voltage of 65 V, 17 Pa pressure, 4-cm electrode gap, grounded bottom electrode, showerhead-type top electrode with gas flow consisting of a 30:1 argon silane ratio. Simulation results are presented and compared with the results of a corresponding sectional method under the same test conditions.

Original language	English (US)
Title of host publication	AIAA Scitech 2020 Forum
Publisher	American Institute of Aeronautics and Astronautics Inc, AIAA
ISBN (Print)	9781624105951
DOIs	https://doi.org/10.2514/6.2020-2156
State	Published - 2020
Event	AIAA Scitech Forum, 2020 - Orlando, United States Duration: Jan 6 2020 → Jan 10 2020

Publication series

Name	AIAA Scitech 2020 Forum
Volume	1 PartF

Conference

Conference	AIAA Scitech Forum, 2020
Country/Territory	United States
City	Orlando
Period	1/6/20 → 1/10/20

Bibliographical note

Publisher Copyright:
© 2020, American Institute of Aeronautics and Astronautics Inc, AIAA. All rights reserved.

Publisher link

10.2514/6.2020-2156

Find It

Find It at U of M Libraries

Cite this

Hybrid method of moments to predict nanoparticle nucleation, growth and charging in dusty plasmas. / Narayanan, Sai R.; Yang, Suo; Girshick, Steven L.
AIAA Scitech 2020 Forum. American Institute of Aeronautics and Astronautics Inc, AIAA, 2020. (AIAA Scitech 2020 Forum; Vol. 1 PartF).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

@inproceedings{8bedf78d659744a3a1d8aa76c15aa4e0,

title = "Hybrid method of moments to predict nanoparticle nucleation, growth and charging in dusty plasmas",

abstract = "A 1D numerical model has been developed for a capacitively-coupled RF parallel plate argon-silane dusty plasma. The Hybrid Method of Moments has been used to solve the aerosol population balance equations. The aerosol module is self consistently coupled with a plasma module. This simplified model treats the nucleation and surface growth rates as input parameters. Operating conditions include 13.56 MHz frequency, applied RF voltage of 65 V, 17 Pa pressure, 4-cm electrode gap, grounded bottom electrode, showerhead-type top electrode with gas flow consisting of a 30:1 argon silane ratio. Simulation results are presented and compared with the results of a corresponding sectional method under the same test conditions.",

author = "Narayanan, \{Sai R.\} and Suo Yang and Girshick, \{Steven L.\}",

note = "Publisher Copyright: {\textcopyright} 2020, American Institute of Aeronautics and Astronautics Inc, AIAA. All rights reserved.; AIAA Scitech Forum, 2020 ; Conference date: 06-01-2020 Through 10-01-2020",

year = "2020",

doi = "10.2514/6.2020-2156",

language = "English (US)",

isbn = "9781624105951",

series = "AIAA Scitech 2020 Forum",

publisher = "American Institute of Aeronautics and Astronautics Inc, AIAA",

booktitle = "AIAA Scitech 2020 Forum",

}

TY - GEN

T1 - Hybrid method of moments to predict nanoparticle nucleation, growth and charging in dusty plasmas

AU - Narayanan, Sai R.

AU - Yang, Suo

AU - Girshick, Steven L.

PY - 2020

Y1 - 2020

N2 - A 1D numerical model has been developed for a capacitively-coupled RF parallel plate argon-silane dusty plasma. The Hybrid Method of Moments has been used to solve the aerosol population balance equations. The aerosol module is self consistently coupled with a plasma module. This simplified model treats the nucleation and surface growth rates as input parameters. Operating conditions include 13.56 MHz frequency, applied RF voltage of 65 V, 17 Pa pressure, 4-cm electrode gap, grounded bottom electrode, showerhead-type top electrode with gas flow consisting of a 30:1 argon silane ratio. Simulation results are presented and compared with the results of a corresponding sectional method under the same test conditions.

AB - A 1D numerical model has been developed for a capacitively-coupled RF parallel plate argon-silane dusty plasma. The Hybrid Method of Moments has been used to solve the aerosol population balance equations. The aerosol module is self consistently coupled with a plasma module. This simplified model treats the nucleation and surface growth rates as input parameters. Operating conditions include 13.56 MHz frequency, applied RF voltage of 65 V, 17 Pa pressure, 4-cm electrode gap, grounded bottom electrode, showerhead-type top electrode with gas flow consisting of a 30:1 argon silane ratio. Simulation results are presented and compared with the results of a corresponding sectional method under the same test conditions.

UR - https://www.scopus.com/pages/publications/85092393886

UR - https://www.scopus.com/pages/publications/85092393886#tab=citedBy

U2 - 10.2514/6.2020-2156

DO - 10.2514/6.2020-2156

M3 - Conference contribution

AN - SCOPUS:85092393886

SN - 9781624105951

T3 - AIAA Scitech 2020 Forum

BT - AIAA Scitech 2020 Forum

PB - American Institute of Aeronautics and Astronautics Inc, AIAA

T2 - AIAA Scitech Forum, 2020

Y2 - 6 January 2020 through 10 January 2020

ER -

Hybrid method of moments to predict nanoparticle nucleation, growth and charging in dusty plasmas

Abstract

Publication series

Conference

Bibliographical note

Publisher link

Find It

Other files and links

Fingerprint

Cite this