Hybrid method of moments to predict nanoparticle nucleation, growth and charging in dusty plasmas

Sai R. Narayanan, Suo Yang, Steven L. Girshick

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A 1D numerical model has been developed for a capacitively-coupled RF parallel plate argon-silane dusty plasma. The Hybrid Method of Moments has been used to solve the aerosol population balance equations. The aerosol module is self consistently coupled with a plasma module. This simplified model treats the nucleation and surface growth rates as input parameters. Operating conditions include 13.56 MHz frequency, applied RF voltage of 65 V, 17 Pa pressure, 4-cm electrode gap, grounded bottom electrode, showerhead-type top electrode with gas flow consisting of a 30:1 argon silane ratio. Simulation results are presented and compared with the results of a corresponding sectional method under the same test conditions.

Original languageEnglish (US)
Title of host publicationAIAA Scitech 2020 Forum
PublisherAmerican Institute of Aeronautics and Astronautics Inc, AIAA
ISBN (Print)9781624105951
DOIs
StatePublished - 2020
EventAIAA Scitech Forum, 2020 - Orlando, United States
Duration: Jan 6 2020Jan 10 2020

Publication series

NameAIAA Scitech 2020 Forum
Volume1 PartF

Conference

ConferenceAIAA Scitech Forum, 2020
Country/TerritoryUnited States
CityOrlando
Period1/6/201/10/20

Bibliographical note

Funding Information:
This work was partially supported by the US Department of Energy Plasma Science Center. S. Yang gratefully acknowledges the faculty start-up funding from the Department of Mechanical Engineering and College of Science and Engineering at the University of Minnesota. The authors gratefully acknowledge the computational resources from the Minnesota Supercomputing Institute (MSI).

Publisher Copyright:
© 2020, American Institute of Aeronautics and Astronautics Inc, AIAA. All rights reserved.

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