Abstract
A 1D numerical model has been developed for a capacitively-coupled RF parallel plate argon-silane dusty plasma. The Hybrid Method of Moments has been used to solve the aerosol population balance equations. The aerosol module is self consistently coupled with a plasma module. This simplified model treats the nucleation and surface growth rates as input parameters. Operating conditions include 13.56 MHz frequency, applied RF voltage of 65 V, 17 Pa pressure, 4-cm electrode gap, grounded bottom electrode, showerhead-type top electrode with gas flow consisting of a 30:1 argon silane ratio. Simulation results are presented and compared with the results of a corresponding sectional method under the same test conditions.
| Original language | English (US) |
|---|---|
| Title of host publication | AIAA Scitech 2020 Forum |
| Publisher | American Institute of Aeronautics and Astronautics Inc, AIAA |
| ISBN (Print) | 9781624105951 |
| DOIs | |
| State | Published - 2020 |
| Event | AIAA Scitech Forum, 2020 - Orlando, United States Duration: Jan 6 2020 → Jan 10 2020 |
Publication series
| Name | AIAA Scitech 2020 Forum |
|---|---|
| Volume | 1 PartF |
Conference
| Conference | AIAA Scitech Forum, 2020 |
|---|---|
| Country/Territory | United States |
| City | Orlando |
| Period | 1/6/20 → 1/10/20 |
Bibliographical note
Funding Information:This work was partially supported by the US Department of Energy Plasma Science Center. S. Yang gratefully acknowledges the faculty start-up funding from the Department of Mechanical Engineering and College of Science and Engineering at the University of Minnesota. The authors gratefully acknowledge the computational resources from the Minnesota Supercomputing Institute (MSI).
Publisher Copyright:
© 2020, American Institute of Aeronautics and Astronautics Inc, AIAA. All rights reserved.