Abstract
A 1D numerical model has been developed for a capacitively-coupled RF parallel plate argon-silane dusty plasma. The Hybrid Method of Moments has been used to solve the aerosol population balance equations. The aerosol module is self consistently coupled with a plasma module. This simplified model treats the nucleation and surface growth rates as input parameters. Operating conditions include 13.56 MHz frequency, applied RF voltage of 65 V, 17 Pa pressure, 4-cm electrode gap, grounded bottom electrode, showerhead-type top electrode with gas flow consisting of a 30:1 argon silane ratio. Simulation results are presented and compared with the results of a corresponding sectional method under the same test conditions.
| Original language | English (US) |
|---|---|
| Title of host publication | AIAA Scitech 2020 Forum |
| Publisher | American Institute of Aeronautics and Astronautics Inc, AIAA |
| ISBN (Print) | 9781624105951 |
| DOIs | |
| State | Published - 2020 |
| Event | AIAA Scitech Forum, 2020 - Orlando, United States Duration: Jan 6 2020 → Jan 10 2020 |
Publication series
| Name | AIAA Scitech 2020 Forum |
|---|---|
| Volume | 1 PartF |
Conference
| Conference | AIAA Scitech Forum, 2020 |
|---|---|
| Country/Territory | United States |
| City | Orlando |
| Period | 1/6/20 → 1/10/20 |
Bibliographical note
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