High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography

Keyphrases

• High-throughput Fabrication 100%
• Atom Lithography 100%
• Ultrasmall 100%
• Resonant Metamaterials 100%
• Coaxial Aperture 100%
• Metamaterials 33%
• Fabry 33%
• Fabrication Methods 33%
• Optical Surface 33%
• Subwavelength Structures 33%
• Gap Size 33%
• Gold Film 33%
• Optical Trapping 33%
• Resonant Period 33%
• Metal Surface 33%
• Packing Density 33%
• Cavity Length 33%
• Annular Gap 33%
• Wafer-scale 33%
• Open Area 33%
• Infrared Light 33%
• Glancing Angle 33%
• Extraordinary Optical Transmission 33%
• Nonlinear Optics 33%
• Slow Light 33%
• Energy Accumulation 33%
• Surface-enhanced Spectroscopy 33%
• Non-propagating 33%
• Dense Array 33%
• Nanocavity 33%
• Resonance Wavelength 33%
• Large-area Array 33%
• Ion Polishing 33%
• Epsilon-near-zero 33%
• Coaxial Resonator 33%
• Gap Volume 33%
• Zeroth-order 33%

Material Science

• Lithography 100%
• Metamaterial 100%
• Density 33%
• Film 33%
• Metal Surface 33%
• Resonator 33%