High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines

Lucas N. Taylor; Joseph J. Talghader

doi:10.1109/OMN.2015.7288881

High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines

Lucas N. Taylor
, Joseph J. Talghader

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Thermal deformation waves in a soda-lime-silica glass substrate were measured using high-speed Hilbert-phase interferometry during interconnect heating and Q-switched Nd:YAG irradiation. 100-microsecond thermal events were captured with 256x256 resolution over a 100 micron square area.

Original language	English (US)
Title of host publication	OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781467368346
DOIs	https://doi.org/10.1109/OMN.2015.7288881
State	Published - Oct 2 2015
Event	International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: Aug 2 2015 → Aug 5 2015

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	02-05-August-2015
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	International Conference on Optical MEMS and Nanophotonics, OMN 2015
Country/Territory	Israel
City	Jerusalem
Period	8/2/15 → 8/5/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

heat transfer
high-speed camera
interferometry
laser damage
thermal damage
thermal monitoring

Publisher link

10.1109/OMN.2015.7288881

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Taylor, L. N., & Talghader, J. J. (2015). High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines. In OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings Article 7288881 (International Conference on Optical MEMS and Nanophotonics; Vol. 02-05-August-2015). IEEE Computer Society. https://doi.org/10.1109/OMN.2015.7288881

High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines. / Taylor, Lucas N.; Talghader, Joseph J.
OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings. IEEE Computer Society, 2015. 7288881 (International Conference on Optical MEMS and Nanophotonics; Vol. 02-05-August-2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Taylor, LN & Talghader, JJ 2015, High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines. in OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings., 7288881, International Conference on Optical MEMS and Nanophotonics, vol. 02-05-August-2015, IEEE Computer Society, International Conference on Optical MEMS and Nanophotonics, OMN 2015, Jerusalem, Israel, 8/2/15. https://doi.org/10.1109/OMN.2015.7288881

Taylor LN, Talghader JJ. High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines. In OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings. IEEE Computer Society. 2015. 7288881. (International Conference on Optical MEMS and Nanophotonics). doi: 10.1109/OMN.2015.7288881

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title = "High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines",

abstract = "Thermal deformation waves in a soda-lime-silica glass substrate were measured using high-speed Hilbert-phase interferometry during interconnect heating and Q-switched Nd:YAG irradiation. 100-microsecond thermal events were captured with 256x256 resolution over a 100 micron square area.",

keywords = "heat transfer, high-speed camera, interferometry, laser damage, thermal damage, thermal monitoring",

author = "Taylor, \{Lucas N.\} and Talghader, \{Joseph J.\}",

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KW - interferometry

KW - laser damage

KW - thermal damage

KW - thermal monitoring

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ER -

High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines

Abstract

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Bibliographical note

Keywords

Publisher link

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