High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines

Lucas N. Taylor, Joseph J. Talghader

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Thermal deformation waves in a soda-lime-silica glass substrate were measured using high-speed Hilbert-phase interferometry during interconnect heating and Q-switched Nd:YAG irradiation. 100-microsecond thermal events were captured with 256x256 resolution over a 100 micron square area.

Original languageEnglish (US)
Title of host publicationOMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781467368346
DOIs
StatePublished - Oct 2 2015
EventInternational Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel
Duration: Aug 2 2015Aug 5 2015

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume02-05-August-2015
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

OtherInternational Conference on Optical MEMS and Nanophotonics, OMN 2015
CountryIsrael
CityJerusalem
Period8/2/158/5/15

Keywords

  • heat transfer
  • high-speed camera
  • interferometry
  • laser damage
  • thermal damage
  • thermal monitoring

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  • Cite this

    Taylor, L. N., & Talghader, J. J. (2015). High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines. In OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings [7288881] (International Conference on Optical MEMS and Nanophotonics; Vol. 02-05-August-2015). IEEE Computer Society. https://doi.org/10.1109/OMN.2015.7288881