High-resolution sampling sem for quantitative investigations of semiconductor devices and integrated circuits

A. Gopinath, K. G. Gopinathan

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

A scanning microscope has been interfaced with sampling circuitry to record high-speed voltage waveforms at internal points in devices. The system is capable of resolving rise times of 100 ps and voltage steps with an uncertainty of less than 10 mV. Results demonstrate the operation of the 4-GHz sampling SEM.

Original languageEnglish (US)
Pages (from-to)431-434
Number of pages4
JournalIEEE Transactions on Electron Devices
Volume25
Issue number4
DOIs
StatePublished - Apr 1978

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