High-resolution sampling sem for quantitative investigations of semiconductor devices and integrated circuits

A. Gopinath; K. G. Gopinathan

doi:10.1109/T-ED.1978.19103

High-resolution sampling sem for quantitative investigations of semiconductor devices and integrated circuits

A. Gopinath, K. G. Gopinathan

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

A scanning microscope has been interfaced with sampling circuitry to record high-speed voltage waveforms at internal points in devices. The system is capable of resolving rise times of 100 ps and voltage steps with an uncertainty of less than 10 mV. Results demonstrate the operation of the 4-GHz sampling SEM.

Original language	English (US)
Pages (from-to)	431-434
Number of pages	4
Journal	IEEE Transactions on Electron Devices
Volume	25
Issue number	4
DOIs	https://doi.org/10.1109/T-ED.1978.19103
State	Published - Apr 1978

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10.1109/T-ED.1978.19103

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title = "High-resolution sampling sem for quantitative investigations of semiconductor devices and integrated circuits",

abstract = "A scanning microscope has been interfaced with sampling circuitry to record high-speed voltage waveforms at internal points in devices. The system is capable of resolving rise times of 100 ps and voltage steps with an uncertainty of less than 10 mV. Results demonstrate the operation of the 4-GHz sampling SEM.",

author = "A. Gopinath and Gopinathan, {K. G.}",

year = "1978",

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doi = "10.1109/T-ED.1978.19103",

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AU - Gopinathan, K. G.

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AB - A scanning microscope has been interfaced with sampling circuitry to record high-speed voltage waveforms at internal points in devices. The system is capable of resolving rise times of 100 ps and voltage steps with an uncertainty of less than 10 mV. Results demonstrate the operation of the 4-GHz sampling SEM.

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JO - IEEE Transactions on Electron Devices

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High-resolution sampling sem for quantitative investigations of semiconductor devices and integrated circuits

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