High-resolution imaging ellipsometer

Qiwen Zhan, James R. Leger

Research output: Contribution to journalArticlepeer-review

61 Scopus citations


We report on a novel imaging ellipsometer using a high-numerical-aperture (NA) objective lens capable of measuring a two-dimensional ellipsometric signal with high resolution. Two-dimensional ellipsometric imaging is made possible by spatial filtering at the pupil plane of the objective. A Richards–Wolf vectorial diffraction model and geometrical optics model are developed to simulate the system. The thickness profile of patterned polymethyl methacrylate is measured for calibration purposes. Our instrument has a sensitivity of 5 Å and provides spatial resolution of approximately 0.5 μm with 632.8-nm illumination. Its capability of measuring refractive-index variations with high spatial resolution is also demonstrated.

Original languageEnglish (US)
Pages (from-to)4443-4450
Number of pages8
JournalApplied Optics
Issue number22
StatePublished - Aug 1 2002


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