HIGH RESOLUTION BACKPROJECTION IMAGING WITH A SCANNING LASER ACOUSTIC MICROSCOPE.

R. K. Mueller; W. P. Robbins; Z. Q. Zhou; E. Rudd

doi:10.1109/ultsym.1986.198838

HIGH RESOLUTION BACKPROJECTION IMAGING WITH A SCANNING LASER ACOUSTIC MICROSCOPE.

R. K. Mueller, W. P. Robbins, Z. Q. Zhou, E. Rudd

Electrical and Computer Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

A back-projection imaging capability has been implemented on a scanning laser acoustic microscope, which permits the reconstruction of clear well-defined images of acoustic features which are far below (by tens of acoustic wavelengths) the laser-scanned surface. Several types of test features have been imaged, including electron microscope locator grids affixed to the bottom side of glass slides and etched features (approximately 5- mu m deep) on a thick (1 cm) glass block. 100-MHz insonification was used and features with lateral dimensions of roughly 50 mu m could be distinguished. Using the same database, two separate images of a feature could be brought into focus, one corresponding to compressional waves and the other to shear waves.

Original language	English (US)
Pages (from-to)	765-768
Number of pages	4
Journal	Ultrasonics Symposium Proceedings
DOIs	https://doi.org/10.1109/ultsym.1986.198838
State	Published - 1986

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10.1109/ultsym.1986.198838

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title = "HIGH RESOLUTION BACKPROJECTION IMAGING WITH A SCANNING LASER ACOUSTIC MICROSCOPE.",

abstract = "A back-projection imaging capability has been implemented on a scanning laser acoustic microscope, which permits the reconstruction of clear well-defined images of acoustic features which are far below (by tens of acoustic wavelengths) the laser-scanned surface. Several types of test features have been imaged, including electron microscope locator grids affixed to the bottom side of glass slides and etched features (approximately 5- mu m deep) on a thick (1 cm) glass block. 100-MHz insonification was used and features with lateral dimensions of roughly 50 mu m could be distinguished. Using the same database, two separate images of a feature could be brought into focus, one corresponding to compressional waves and the other to shear waves.",

author = "Mueller, {R. K.} and Robbins, {W. P.} and Zhou, {Z. Q.} and E. Rudd",

year = "1986",

doi = "10.1109/ultsym.1986.198838",

language = "English (US)",

pages = "765--768",

journal = "Ultrasonics Symposium Proceedings",

issn = "0090-5607",

publisher = "Cambridge University Press",

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AU - Mueller, R. K.

AU - Robbins, W. P.

AU - Zhou, Z. Q.

AU - Rudd, E.

PY - 1986

Y1 - 1986

N2 - A back-projection imaging capability has been implemented on a scanning laser acoustic microscope, which permits the reconstruction of clear well-defined images of acoustic features which are far below (by tens of acoustic wavelengths) the laser-scanned surface. Several types of test features have been imaged, including electron microscope locator grids affixed to the bottom side of glass slides and etched features (approximately 5- mu m deep) on a thick (1 cm) glass block. 100-MHz insonification was used and features with lateral dimensions of roughly 50 mu m could be distinguished. Using the same database, two separate images of a feature could be brought into focus, one corresponding to compressional waves and the other to shear waves.

AB - A back-projection imaging capability has been implemented on a scanning laser acoustic microscope, which permits the reconstruction of clear well-defined images of acoustic features which are far below (by tens of acoustic wavelengths) the laser-scanned surface. Several types of test features have been imaged, including electron microscope locator grids affixed to the bottom side of glass slides and etched features (approximately 5- mu m deep) on a thick (1 cm) glass block. 100-MHz insonification was used and features with lateral dimensions of roughly 50 mu m could be distinguished. Using the same database, two separate images of a feature could be brought into focus, one corresponding to compressional waves and the other to shear waves.

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HIGH RESOLUTION BACKPROJECTION IMAGING WITH A SCANNING LASER ACOUSTIC MICROSCOPE.

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