High resolution 50 nm linear displacement macroscale meander-line PZT actuator

N. A. Riza; D. L. Polla; W. P. Robbins; D. E. Glumac

doi:10.1049/el:19931070

High resolution 50 nm linear displacement macroscale meander-line PZT actuator

N. A. Riza
, D. L. Polla
, W. P. Robbins
, D. E. Glumac

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.

Original language	English (US)
Pages (from-to)	1606-1608
Number of pages	3
Journal	Electronics Letters
Volume	29
Issue number	18
DOIs	https://doi.org/10.1049/el:19931070
State	Published - Sep 1993

Keywords

Piezoelectric devices
Piezoelectric transducers

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10.1049/el:19931070

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@article{c4163980dc714d5fb375ad62913a52a3,

title = "High resolution 50 nm linear displacement macroscale meander-line PZT actuator",

abstract = "A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.",

keywords = "Piezoelectric devices, Piezoelectric transducers",

author = "Riza, \{N. A.\} and Polla, \{D. L.\} and Robbins, \{W. P.\} and Glumac, \{D. E.\}",

year = "1993",

month = sep,

doi = "10.1049/el:19931070",

language = "English (US)",

volume = "29",

pages = "1606--1608",

journal = "Electronics Letters",

issn = "0013-5194",

publisher = "John Wiley \& Sons Inc.",

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AU - Riza, N. A.

AU - Polla, D. L.

AU - Robbins, W. P.

AU - Glumac, D. E.

PY - 1993/9

Y1 - 1993/9

N2 - A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.

AB - A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.

KW - Piezoelectric devices

KW - Piezoelectric transducers

UR - https://www.scopus.com/pages/publications/0027906427

UR - https://www.scopus.com/pages/publications/0027906427#tab=citedBy

U2 - 10.1049/el:19931070

DO - 10.1049/el:19931070

M3 - Article

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SP - 1606

EP - 1608

JO - Electronics Letters

JF - Electronics Letters

IS - 18

ER -

High resolution 50 nm linear displacement macroscale meander-line PZT actuator

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