High resolution 50 nm linear displacement macroscale meander-line PZT actuator

N. A. Riza; D. L. Polla; W. P. Robbins; D. E. Glumac

doi:10.1049/el:19931070

High resolution 50 nm linear displacement macroscale meander-line PZT actuator

N. A. Riza, D. L. Polla, W. P. Robbins, D. E. Glumac

Research output: Contribution to journal › Article › peer-review

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Abstract

A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.

Original language	English (US)
Pages (from-to)	1606-1608
Number of pages	3
Journal	Electronics Letters
Volume	29
Issue number	18
DOIs	https://doi.org/10.1049/el:19931070
State	Published - Sep 1993

Keywords

Piezoelectric devices
Piezoelectric transducers

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10.1049/el:19931070

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title = "High resolution 50 nm linear displacement macroscale meander-line PZT actuator",

abstract = "A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.",

keywords = "Piezoelectric devices, Piezoelectric transducers",

author = "Riza, {N. A.} and Polla, {D. L.} and Robbins, {W. P.} and Glumac, {D. E.}",

year = "1993",

month = sep,

doi = "10.1049/el:19931070",

language = "English (US)",

volume = "29",

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journal = "Electronics Letters",

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AU - Polla, D. L.

AU - Robbins, W. P.

AU - Glumac, D. E.

PY - 1993/9

Y1 - 1993/9

N2 - A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.

AB - A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.

KW - Piezoelectric devices

KW - Piezoelectric transducers

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High resolution 50 nm linear displacement macroscale meander-line PZT actuator

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