High resolution 50 nm linear displacement macroscale meander-line PZT actuator

N. A. Riza, D. L. Polla, W. P. Robbins, D. E. Glumac

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.

Original languageEnglish (US)
Pages (from-to)1606-1608
Number of pages3
JournalElectronics Letters
Volume29
Issue number18
DOIs
StatePublished - Sep 1993

Keywords

  • Piezoelectric devices
  • Piezoelectric transducers

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