High Q optomechanical resonators in silicon nitride nanophotonic circuits

Keyphrases

• NanoString 100%
• Silicon Nitride 100%
• Nanophotonic Circuits 100%
• Optomechanical Resonator 100%
• Optical Components 50%
• Sensing Applications 50%
• On chip 50%
• Fully Integrated 50%
• Bulk Silicon Micromachining 50%
• Effective Integration 50%
• Mechanical Sensing 50%
• Micromechanical Resonator 50%
• Micromachining Technique 50%
• Interferometric 50%
• Mechanical Motion 50%
• Stoichiometric Silicon Nitride 50%
• Photonic Integrated Circuits 50%
• Optomechanics 50%
• In Vacuum 50%
• Gradient Optical Force 50%

Physics

• Nanophotonics 100%
• Silicon Nitride 100%
• Resonator 100%
• Q Factor 100%
• Photonic Integrated Circuits 33%
• Optical Device 33%
• Micromachining 33%