High-Q diamond microresonators in the long-wave infrared

Yu-Jen Lee, Avijit Das, Joseph J. Talghader

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


High quality factor (Q) photonic devices in the room temperature thermal infrared region, corresponding to deeper long-wave infrared with wavelengths beyond 9 microns, have been demonstrated for the first time. Whispering gallery mode diamond microresonators were fabricated using single crystal diamond substrates and oxygen-based inductively coupled plasma (ICP) reactive ion etching (RIE) at high angles. The spectral characteristics of the devices were probed at room temperature using a tunable quantum cascade laser that was free space-coupled into the resonators. Light was extracted via an arsenic selenide (As2Se3) chalcogenide infrared fiber and directed to a cryogenically cooled mercury cadmium telluride (HgCdTe) detector. The quality factors were tested in multiple microresonators across a wide spectral range from 9 to 9.7 microns with similar performance. One example resonance (of many comparables) was found to reach 3648 at 9.601 µm. Fourier analysis of the many resonances of each device showed free spectral ranges slightly greater than 40 GHz, matching theoretical expectations for the microresonator diameter and the overlap of the whispering gallery mode with the diamond.

Original languageEnglish (US)
Pages (from-to)5448-5458
Number of pages11
JournalOptics Express
Issue number4
StatePublished - Feb 17 2020

Bibliographical note

Funding Information:
Portions of this work were conducted in the Minnesota Nano Center, which is supported by the National Science Foundation through the National Nano Coordinated Infrastructure Network (NNCI) under Award Number ECCS-1542202.

Publisher Copyright:
© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

PubMed: MeSH publication types

  • Journal Article


Dive into the research topics of 'High-Q diamond microresonators in the long-wave infrared'. Together they form a unique fingerprint.

Cite this