High precision electrohydrodynamic printing of polymer onto microcantilever sensors

James H. Pikul, Phil Graf, Sandipan Mishra, Kira Barton, Yong Kwan Kim, John A. Rogers, Andrew Alleyne, Placid M. Ferreira, William P. King

Research output: Contribution to journalArticlepeer-review

35 Scopus citations


We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

Original languageEnglish (US)
Article number5729782
Pages (from-to)2246-2253
Number of pages8
JournalIEEE Sensors Journal
Issue number10
StatePublished - 2011
Externally publishedYes

Bibliographical note

Funding Information:
∗This work is supported by The National Natural Science Foundation of China (No. 61877060) † Corresponding author


  • Electrohydrodynamics
  • mass sensing
  • microcantilever
  • microelectromechanical systems
  • polymer deposition
  • polymer printing
  • sensor


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