High precision electrohydrodynamic printing of polymer onto microcantilever sensors

James H. Pikul, Phil Graf, Sandipan Mishra, Kira Barton, Yong Kwan Kim, John A. Rogers, Andrew Alleyne, Placid M. Ferreira, William P. King

Research output: Contribution to journalArticlepeer-review

34 Scopus citations

Abstract

We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

Original languageEnglish (US)
Article number5729782
Pages (from-to)2246-2253
Number of pages8
JournalIEEE Sensors Journal
Volume11
Issue number10
DOIs
StatePublished - 2011
Externally publishedYes

Bibliographical note

Funding Information:
Manuscript received February 04, 2011; accepted March 06, 2011. Date of publication March 14, 2011; date of current version August 05, 2011. This work was supported in part by the NSF Center for Chemical-Electrical-Mechanical Manufacturing Systems, in part by the Defense Advanced Research Projects Agency, and in part by a Carver Fellowship for JHP. The associate editor coordinating the review of this paper and approving it for publication was Dr. Sandro Carrara.

Keywords

  • Electrohydrodynamics
  • mass sensing
  • microcantilever
  • microelectromechanical systems
  • polymer deposition
  • polymer printing
  • sensor

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