The deposition and characterization of thin co-sputtered Bi2Te3 and Sb2Te3 thermoelectric films of thickness comparable to the carrier mean free path is presented. Measurements of the Seebeck coefficient, resistivity, and thermal conductivity are described. The test microstructures are highly thermally isolated and incorporate a micro-heater and thermoelectric junction. Two compositions of each material have been studied. The Sb2Te3 shows resistivities of 29.72μω-m and 26.22μω-m, Seebeck coefficients of 118μV/K and 131μV/K, and a thermal conductivity of 1.02Wm-1K-1, while the Bi2Te3 films show resistivities of 5.22μω-m and 6.15μω-m, Seebeck coefficients of-51μV/K and-50μV/K, and a thermal conductivity of .88Wm-1K-1. The materials systems exhibit thermoelectric figures of merit of 0.93x10-3and 1.23x10-3.