High performance sputtered thermoelectric junctions for micromechanical devices

R. P. Shea, A. S. Gawarikar, J. J. Talghader

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

The deposition and characterization of thin co-sputtered Bi2Te3 and Sb2Te3 thermoelectric films of thickness comparable to the carrier mean free path is presented. Measurements of the Seebeck coefficient, resistivity, and thermal conductivity are described. The test microstructures are highly thermally isolated and incorporate a micro-heater and thermoelectric junction. Two compositions of each material have been studied. The Sb2Te3 shows resistivities of 29.72μω-m and 26.22μω-m, Seebeck coefficients of 118μV/K and 131μV/K, and a thermal conductivity of 1.02Wm-1K-1, while the Bi2Te3 films show resistivities of 5.22μω-m and 6.15μω-m, Seebeck coefficients of-51μV/K and-50μV/K, and a thermal conductivity of .88Wm-1K-1. The materials systems exhibit thermoelectric figures of merit of 0.93x10-3and 1.23x10-3.

Original languageEnglish (US)
Title of host publication2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
EditorsMehran Mehregany, David J. Monk
PublisherTransducer Research Foundation
Pages258-261
Number of pages4
ISBN (Electronic)9780964002494
StatePublished - Jan 1 2012
Event2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 - Hilton Head, United States
Duration: Jun 3 2012Jun 7 2012

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Other

Other2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
CountryUnited States
CityHilton Head
Period6/3/126/7/12

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