High performance nanophotonic circuits based on partially buried horizontal slot waveguides

Chi Xiong, Wolfram H P Pernice, Mo Li, Hong X. Tang

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

We present a novel platform to construct high-performance nanophotonic devices in low refractive index dielectric films at telecoms wavelengths. The formation of horizontal slots by PECVD deposition of high index amorphous silicon provides a convenient and low-cost way to tailor nanophotonic devices to application needs. Low propagation loss of less than 2 dB/cm is obtained allowing us to fabricate optical resonators with measured high optical quality factors exceeding 105. We design and experimentally demonstrate on-chip grating couplers to efficiently couple light into integrated circuitry with coupling loss of 4 dB and optical bandwidth exceeding 110 nm. The entire on-chip circuitry consisting of input/output couplers, Mach-Zehnder interferometers with high extinction ratio and ring, racetrack resonators are designed, fabricated and characterized.

Original languageEnglish (US)
Pages (from-to)20690-20698
Number of pages9
JournalOptics Express
Volume18
Issue number20
DOIs
StatePublished - Sep 27 2010

Fingerprint Dive into the research topics of 'High performance nanophotonic circuits based on partially buried horizontal slot waveguides'. Together they form a unique fingerprint.

Cite this