High performance mixed-potential-type Zirconia-based NO2 sensor with self-organizing surface structures fabricated by low energy ion beam etching

Rui You, Xidong Hao, Hongyan Yu, Baoxu Wang, Geyu Lu, Fangmeng Liu, Tianhong Cui

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The mixed-potential-type NO2 sensor based on a yttria-stabilized zirconia (YSZ) electrolyte with NiO sensing electrode and a three-phase boundary (TPB) was fabricated. The ion beam etching (IBE) technology with low energy was employed to etch the YSZ substrate for the first time. The characterization result indicates that the YSZ substrate prepared by argon ion (Ar+) beam with different incident angles (10° and 40°) obtains hollow and spike patterns on the surface, respectively. The sensing performance was improved by the self-organized nanostructures of TPB, which enhances the contact area obviously. The sensor using a YSZ substrate processed by 10° incident angle with 800 eV/60 mA energy demonstrates the largest response compared with other parameters to NO2 at 850 °C. Sensitivity of the sensors is achieved as 40.7 mV/decade, about 1.9 times as the initial YSZ substrate. In addition, the sensor also has good response-recovery transients, repeatability and selectivity.

Original languageEnglish (US)
Pages (from-to)445-451
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume263
DOIs
StatePublished - Jun 15 2018

Fingerprint

Yttria stabilized zirconia
organizing
yttria-stabilized zirconia
zirconium oxides
Surface structure
Zirconia
Ion beams
Etching
ion beams
etching
sensors
Sensors
Phase boundaries
Substrates
energy
Argon
spikes
Electrolytes
hollow
Nanostructures

Keywords

  • Ion beam etching
  • Mixed-potential
  • NO sensing
  • Self-organized nanostructure
  • Yttria-stabilized-zirconia

Cite this

High performance mixed-potential-type Zirconia-based NO2 sensor with self-organizing surface structures fabricated by low energy ion beam etching. / You, Rui; Hao, Xidong; Yu, Hongyan; Wang, Baoxu; Lu, Geyu; Liu, Fangmeng; Cui, Tianhong.

In: Sensors and Actuators, B: Chemical, Vol. 263, 15.06.2018, p. 445-451.

Research output: Contribution to journalArticle

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AU - Hao, Xidong

AU - Yu, Hongyan

AU - Wang, Baoxu

AU - Lu, Geyu

AU - Liu, Fangmeng

AU - Cui, Tianhong

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