Abstract
Fabrication and characterization of high detectivity thermopile infrared detectors with spectrally selective absorption operating at room temperature is described. The detector architecture consists of a Johnson noise limited thermoelectric readout scheme integrated with a resonant cavity coupled absorber and a low thermal conductance support structure. A resonant responsivity enhancement of 4.3 and a peak detectivity of 1.3×109 cm Hz 1/2 Watt1 at 10.5 μm wavelength are demonstrated.
Original language | English (US) |
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Title of host publication | 2013 Transducers and Eurosensors XXVII |
Subtitle of host publication | The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 |
Pages | 2704-2707 |
Number of pages | 4 |
DOIs | |
State | Published - Dec 1 2013 |
Event | 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain Duration: Jun 16 2013 → Jun 20 2013 |
Other
Other | 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 |
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Country/Territory | Spain |
City | Barcelona |
Period | 6/16/13 → 6/20/13 |
Keywords
- high detectivity
- optical cavity
- Thermal detectors
- thermoelectrics
- wavelength selectivity