High detectivity uncooled thermopile detectors with spectrally selective responsivity

A. S. Gawarikar, R. P. Shea, Joseph J Talghader

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Fabrication and characterization of high detectivity thermopile infrared detectors with spectrally selective absorption operating at room temperature is described. The detector architecture consists of a Johnson noise limited thermoelectric readout scheme integrated with a resonant cavity coupled absorber and a low thermal conductance support structure. A resonant responsivity enhancement of 4.3 and a peak detectivity of 1.3×109 cm Hz 1/2 Watt1 at 10.5 μm wavelength are demonstrated.

Original languageEnglish (US)
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages2704-2707
Number of pages4
DOIs
StatePublished - Dec 1 2013
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: Jun 16 2013Jun 20 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period6/16/136/20/13

Keywords

  • high detectivity
  • optical cavity
  • Thermal detectors
  • thermoelectrics
  • wavelength selectivity

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