Abstract
We describe uncooled thermal detectors with a peak detectivity of at least 3 × 109 cm √Hz/W with spectrally selective absorption in the long-wave infrared. The spectral selectivity in absorption is achieved through resonant cavity coupling of a thin metal film with a low-order air-gap optical cavity. The electrical readout uses thermoelectric thin films with a Johnson noise limited performance. The detectors are of multiple sizes but those with 100-μm2 area have time constants of 58 ms and thermal conductances of 2.3 × 10-7 W/K.
Original language | English (US) |
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Article number | 6553377 |
Pages (from-to) | 2586-2591 |
Number of pages | 6 |
Journal | IEEE Transactions on Electron Devices |
Volume | 60 |
Issue number | 8 |
DOIs | |
State | Published - 2013 |
Keywords
- Infrared detectors
- Optical resonators
- Thermoelectric devices