High detectivity uncooled thermal detectors with resonant cavity coupled absorption in the long-wave infrared

Anand S. Gawarikar, Ryan P. Shea, Joseph J Talghader

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

We describe uncooled thermal detectors with a peak detectivity of at least 3 × 109 cm √Hz/W with spectrally selective absorption in the long-wave infrared. The spectral selectivity in absorption is achieved through resonant cavity coupling of a thin metal film with a low-order air-gap optical cavity. The electrical readout uses thermoelectric thin films with a Johnson noise limited performance. The detectors are of multiple sizes but those with 100-μm2 area have time constants of 58 ms and thermal conductances of 2.3 × 10-7 W/K.

Original languageEnglish (US)
Article number6553377
Pages (from-to)2586-2591
Number of pages6
JournalIEEE Transactions on Electron Devices
Volume60
Issue number8
DOIs
StatePublished - 2013

Keywords

  • Infrared detectors
  • Optical resonators
  • Thermoelectric devices

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