High bandwidth nano-positioner: A robust control approach

S. Salapaka; A. Sebastian; J. P. Cleveland; M. V. Salapaka

doi:10.1063/1.1499533

High bandwidth nano-positioner: A robust control approach

S. Salapaka
, A. Sebastian
, J. P. Cleveland
, M. V. Salapaka

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

386 Scopus citations

Original language	English (US)
Pages (from-to)	3232
Number of pages	1
Journal	Review of Scientific Instruments
Volume	73
Issue number	9
DOIs	https://doi.org/10.1063/1.1499533
State	Published - Sep 2002

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10.1063/1.1499533

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title = "High bandwidth nano-positioner: A robust control approach",

author = "S. Salapaka and A. Sebastian and Cleveland, \{J. P.\} and Salapaka, \{M. V.\}",

year = "2002",

month = sep,

doi = "10.1063/1.1499533",

language = "English (US)",

volume = "73",

pages = "3232",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

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T1 - High bandwidth nano-positioner

T2 - A robust control approach

AU - Salapaka, S.

AU - Sebastian, A.

AU - Cleveland, J. P.

AU - Salapaka, M. V.

PY - 2002/9

Y1 - 2002/9

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UR - https://www.scopus.com/pages/publications/18544370052#tab=citedBy

U2 - 10.1063/1.1499533

DO - 10.1063/1.1499533

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AN - SCOPUS:18544370052

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VL - 73

SP - 3232

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 9

ER -

High bandwidth nano-positioner: A robust control approach

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