High bandwidth nano-positioner: A robust control approach

S. Salapaka, A. Sebastian, J. P. Cleveland, M. V. Salapaka

Research output: Contribution to journalArticlepeer-review

358 Scopus citations
Original languageEnglish (US)
Pages (from-to)3232
Number of pages1
JournalReview of Scientific Instruments
Volume73
Issue number9
DOIs
StatePublished - Sep 2002

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