Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing

Yu Chen, Hongtao Lin, Juejun Hu, Mo Li

Research output: Contribution to journalArticlepeer-review

154 Scopus citations


Besides being the foundational material for microelectronics, crystalline silicon has long been used for the production of infrared lenses and mirrors. More recently, silicon has become the key material to achieve large-scale integration of photonic devices for on-chip optical interconnect and signal processing. For optics, silicon has significant advantages: it offers a very high refractive index and is highly transparent in the spectral range from 1.2 to 8 μm. To fully exploit silicon's superior performance in a remarkably broad range and to enable new optoelectronic functionalities, here we describe a general method to integrate silicon photonic devices on arbitrary foreign substrates. In particular, we apply the technique to integrate silicon microring resonators on mid-infrared compatible substrates for operation in the mid-infrared. These high-performance mid-infrared optical resonators are utilized to demonstrate, for the first time, on-chip cavity-enhanced mid-infrared spectroscopic analysis of organic chemicals with a limit of detection of less than 0.1 ng.

Original languageEnglish (US)
Pages (from-to)6955-6961
Number of pages7
JournalACS nano
Issue number7
StatePublished - Jul 22 2014


  • IR spectroscopy
  • mid-infrared photonics
  • optical cavities


Dive into the research topics of 'Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing'. Together they form a unique fingerprint.

Cite this