Heterogeneously integrated MIR silicon photonics

Yu Chen, Hongtao Lin, Juejun Hu, Mo Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

By utilizing heterogeneous integration method, integrated silicon photonics on mid-IR compatible substrate has been fabricated and on-chip cavity-enhanced mid-IR spectroscopic analysis of organic chemicals has been demonstrated.

Original languageEnglish (US)
Title of host publication2014 Conference on Lasers and Electro-Optics, CLEO 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Volume2014-January
StatePublished - Jan 1 2014
Event2014 Conference on Lasers and Electro-Optics, CLEO 2014 - San Jose, United States
Duration: Jun 8 2014Jun 13 2014

Other

Other2014 Conference on Lasers and Electro-Optics, CLEO 2014
CountryUnited States
CitySan Jose
Period6/8/146/13/14

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