Abstract
By utilizing heterogeneous integration method, integrated silicon photonics on mid-IR compatible substrate has been fabricated and on-chip cavity-enhanced mid-IR spectroscopic analysis of organic chemicals has been demonstrated.
| Original language | English (US) |
|---|---|
| Title of host publication | 2014 Conference on Lasers and Electro-Optics, CLEO 2014 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Volume | 2014-January |
| State | Published - Jan 1 2014 |
| Event | 2014 Conference on Lasers and Electro-Optics, CLEO 2014 - San Jose, United States Duration: Jun 8 2014 → Jun 13 2014 |
Other
| Other | 2014 Conference on Lasers and Electro-Optics, CLEO 2014 |
|---|---|
| Country/Territory | United States |
| City | San Jose |
| Period | 6/8/14 → 6/13/14 |