Heterogeneously integrated MIR silicon photonics

Yu Chen, Hongtao Lin, Juejun Hu, Mo Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution


By utilizing heterogeneous integration method, integrated silicon photonics on mid-IR compatible substrate has been fabricated and on-chip cavity-enhanced mid-IR spectroscopic analysis of organic chemicals has been demonstrated.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2014
PublisherOptical Society of American (OSA)
ISBN (Print)9781557529992
StatePublished - Jan 1 2014
EventCLEO: Science and Innovations, CLEO_SI 2014 - San Jose, CA, United States
Duration: Jun 8 2014Jun 13 2014

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


OtherCLEO: Science and Innovations, CLEO_SI 2014
Country/TerritoryUnited States
CitySan Jose, CA


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