Harmonic analysis based modeling of tapping-mode AFM

A. Sebastian, M. V. Salapaka, D. J. Chen, J. P. Cleveland

Research output: Contribution to journalConference articlepeer-review

48 Scopus citations


In this paper we use harmonic balance and averaging techniques to analyze the tapping mode dynamics of the atomic force microscope. A model for the cantilever sample interaction is developed. Experimental results show that the analysis and the model predict the behavior of the tapping cantilever.

Original languageEnglish (US)
Pages (from-to)232-236
Number of pages5
JournalProceedings of the American Control Conference
StatePublished - Dec 1 1999
EventProceedings of the 1999 American Control Conference (99ACC) - San Diego, CA, USA
Duration: Jun 2 1999Jun 4 1999


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