In this paper we use harmonic balance and averaging techniques to analyze the tapping mode dynamics of the atomic force microscope. A model for the cantilever sample interaction is developed. Experimental results show that the analysis and the model predict the behavior of the tapping cantilever.
|Original language||English (US)|
|Number of pages||5|
|Journal||Proceedings of the American Control Conference|
|State||Published - Dec 1 1999|
|Event||Proceedings of the 1999 American Control Conference (99ACC) - San Diego, CA, USA|
Duration: Jun 2 1999 → Jun 4 1999