Hard and soft micromachining for BioMEMS: Review of techniques and examples of applications in microfluidics and drug delivery

Babak Ziaie; Antonio Baldi; Ming Lei; Yuandong Gu; Ronald A. Siegel

doi:10.1016/j.addr.2003.09.001

Hard and soft micromachining for BioMEMS: Review of techniques and examples of applications in microfluidics and drug delivery

Babak Ziaie, Antonio Baldi, Ming Lei, Yuandong Gu, Ronald A. Siegel

Pharmaceutics

Research output: Contribution to journal › Article › peer-review

371 Scopus citations

Abstract

Recent development in microfabrication (micromachining, microelectromechanical systems, MEMS) permits the integration of hard and soft structures, and enables the design of controllable microfluidic systems, which may be applied to drug delivery. In this paper, we present a tutorial review of both classical "hard" and more recent "soft" micromachining techniques. We then provide examples where these techniques are combined to produce hydrogel-based microfluidic control systems. The most complex of these systems utilizes a very small hydrogel based on phenylboronic acid to control the flow of an insulin solution in response to changes in glucose concentration.

Original language	English (US)
Pages (from-to)	145-172
Number of pages	28
Journal	Advanced Drug Delivery Reviews
Volume	56
Issue number	2
DOIs	https://doi.org/10.1016/j.addr.2003.09.001
State	Published - Feb 10 2004

Bibliographical note

Funding Information:
This work was funded in part by grant DAMD17-02-1-0722 from the U.S. Army Medical Research and Materiel Command, and by grants from the Drug Delivery Center and Biomedical Engineering Institute at the University of Minnesota. We thank Paul Loftness, Sarah Hruby, Hao Hou, and David Beebe for their contributions and input.

Keywords

Closed-loop insulin delivery
Glucose-sensitive
Hydrogels
MEMS
Microfluidics
Phenylboronic acid

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10.1016/j.addr.2003.09.001

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abstract = "Recent development in microfabrication (micromachining, microelectromechanical systems, MEMS) permits the integration of hard and soft structures, and enables the design of controllable microfluidic systems, which may be applied to drug delivery. In this paper, we present a tutorial review of both classical {"}hard{"} and more recent {"}soft{"} micromachining techniques. We then provide examples where these techniques are combined to produce hydrogel-based microfluidic control systems. The most complex of these systems utilizes a very small hydrogel based on phenylboronic acid to control the flow of an insulin solution in response to changes in glucose concentration.",

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author = "Babak Ziaie and Antonio Baldi and Ming Lei and Yuandong Gu and Siegel, {Ronald A.}",

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AU - Gu, Yuandong

AU - Siegel, Ronald A.

N1 - Funding Information: This work was funded in part by grant DAMD17-02-1-0722 from the U.S. Army Medical Research and Materiel Command, and by grants from the Drug Delivery Center and Biomedical Engineering Institute at the University of Minnesota. We thank Paul Loftness, Sarah Hruby, Hao Hou, and David Beebe for their contributions and input.

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Hard and soft micromachining for BioMEMS: Review of techniques and examples of applications in microfluidics and drug delivery

Abstract

Bibliographical note

Keywords

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