Hafnium oxide gate dielectrics on sulfur-passivated germanium

Martin M. Frank, Steven J. Koester, Matthew Copel, John A. Ott, Vamsi K. Paruchuri, Hulling Shang, Rainer Loesing

Research output: Contribution to journalArticlepeer-review

133 Scopus citations

Fingerprint

Dive into the research topics of 'Hafnium oxide gate dielectrics on sulfur-passivated germanium'. Together they form a unique fingerprint.

Keyphrases

Material Science