Group IVB metal oxides high permittivity gate insulators deposited from anhydrous metal nitrates

  • Tiezhong Ma
  • , Stephen A. Campbell
  • , Ryan Smith
  • , Noel Hoilien
  • , Boyong He
  • , Wayne L. Gladfelter
  • , Christopher Hobbs
  • , Doug Buchanan
  • , Charles Taylor
  • , Michael Gribelyuk
  • , Mike Tiner
  • , Matthew Coppel
  • , Jang Jung Lee

Research output: Contribution to journal › Article › peer-review

60 Scopus citations

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Engineering