Graphene cantilever beams for nano switches

Peng Li, Zheng You, Tianhong Cui

Research output: Contribution to journalArticlepeer-review

39 Scopus citations

Abstract

A method named sacrificial beam is presented to fabricate graphene cantilever devices. The mechanical properties of graphene cantilevers are studied using atomic force microscopy. Graphene cantilever based 2-terminal nano-electro-mechanical systems switches are demonstrated, and their DC characteristics and switch performance are investigated. A 3-terminal switch based on a graphene cantilever is fabricated, and its electrical properties are also studied.

Original languageEnglish (US)
Article number093111
JournalApplied Physics Letters
Volume101
Issue number9
DOIs
StatePublished - Aug 27 2012

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