Abstract
A method named sacrificial beam is presented to fabricate graphene cantilever devices. The mechanical properties of graphene cantilevers are studied using atomic force microscopy. Graphene cantilever based 2-terminal nano-electro-mechanical systems switches are demonstrated, and their DC characteristics and switch performance are investigated. A 3-terminal switch based on a graphene cantilever is fabricated, and its electrical properties are also studied.
Original language | English (US) |
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Article number | 093111 |
Journal | Applied Physics Letters |
Volume | 101 |
Issue number | 9 |
DOIs | |
State | Published - Aug 27 2012 |
Bibliographical note
Copyright:Copyright 2012 Elsevier B.V., All rights reserved.