Low temperature plasmas (LTPs) enable to create a highly reactive environment at near ambient temperatures due to the energetic electrons with typical kinetic energies in the range of 1 to 10 eV (1 eV = 11600K), which are being used in applications ranging from plasma etching of electronic chips and additive manufacturing to plasma-assisted combustion. LTPs are at the core of many advanced technologies. Without LTPs, many of the conveniences of modern society would simply not exist. New applications of LTPs are continuously being proposed. Researchers are facing many grand challenges before these new applications can be translated to practice. In this paper, we will discuss the challenges being faced in the field of LTPs, in particular for atmospheric pressure plasmas, with a focus on health, energy and sustainability.
Bibliographical noteFunding Information:
XL and DL work was supported by the National Key Research and Development Program of China (Grant No. 2021YFE0114700) and National Natural Science Foundation of China (Grant Nos. 52130701 and 51977096); PB acknowledges support from the US Department of Energy, Office of Science, Office of Fusion Energy Sciences, General Plasma Science program, under Award DE-SC-0020232, the National Science Foundation under Award PHY 2020695 and the Army Research Office under Grant W911NF-20-1-0105; GN work was supported by the Russian Foundation for Basic Research (Grant No. 20-02-00320); AB work was partially supported by the European Research Council (ERC) under the European Union’s Horizon 2020 research and innovation programme (grant agreement No 810182—SCOPE ERC Synergy project); ML work was partially supported by the US Air Force Office of Scientific Research; MKwork was supported by National Science Foundation grant 1747760; ER and J-MP work were supported through: ARD Centre Val de Loire—Project MINIONs (2020-00141275), and ANRT, CIFRE phD fellowship funded by LVMH Recherche, Saint Jean de Braye (France); KO work was partially supported by the Australian Research Council, Centre for Materials Science, and Centre for Biomedical Technologies.
Copyright © 2022 Lu, Bruggeman, Reuter, Naidis, Bogaerts, Laroussi, Keidar, Robert, Pouvesle, Liu and Ostrikov.
- atmospheric pressure plasmas
- low temperature plasmas (LTP)
- plasma etching (PE)
- plasma for energy conversion
- plasma for health
- plasma-assisted combustion