Abstract
This invited talk focuses on two aspects of generation and growth of nanometer-sized particles in chemically active low-pressure plasmas: the nucleation of initial clusters and the subsequent growth due to coagulation of primary particles. Progress on the modeling of these processes is presented.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1871-1877 |
| Number of pages | 7 |
| Journal | Pure and Applied Chemistry |
| Volume | 71 |
| Issue number | 10 |
| DOIs | |
| State | Published - 1999 |
Bibliographical note
Funding Information:This work was supported in part by NSF grant ECS-9731568 and by the University of Minnesota Supercomputing Institute.