Gate Stack and Silicide Issues in Silicon Processing: Preface

L. A. Clevenger, S. A. Campbell, P. R. Besser, S. B. Herner, J. Kittl

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish (US)
JournalMaterials Research Society Symposium - Proceedings
Volume611
StatePublished - Jan 1 2001
EventGate Stack and Silicide Issues in Silicon Processing - San Francisco, CA, United States
Duration: Apr 25 2000Apr 27 2000

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