Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide

A. V. Riazanova, B. N. Costanzi, A. I. Aristov, Y. G.M. Rikers, J. J.L. Mulders, A. V. Kabashin, E. Dan Dahlberg, L. M. Belova

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Electron-beam-induced deposition of titanium oxide nanopatterns is described. The precursor is titanium tetra-isopropoxide, delivered to the deposition point through a needle and mixed with oxygen at the same point via a flow through a separate needle. The depositions are free of residual carbon and have an EDX determined stoichiometry of TiO2.2. High resolution transmission electron microscopy and Raman spectroscopy studies reveal an amorphous structure of the fabricated titanium oxide. Ellipsometric characterization of the deposited material reveals a refractive index of 2.2-2.4 RIU in the spectral range of 500-1700 nm and a very low extinction coefficient (lower than 10-6 in the range of 400-1700 nm), which is consistent with high quality titanium oxide. The electrical resistivity of the titanium oxide patterned with this new process is in the range of 10-40 GΩ cm and the measured breakdown field is in the range of 10-70 V μm-1. The fabricated nanopatterns are important for a variety of applications, including field-effect transistors, memory devices, MEMS, waveguide structures, bio- and chemical sensors.

Original languageEnglish (US)
Article number115304
JournalNanotechnology
Volume27
Issue number11
DOIs
StatePublished - Feb 16 2016

Fingerprint

Titanium oxides
Electron beams
Gases
Needles
Field effect transistors
High resolution transmission electron microscopy
Titanium
Chemical sensors
Stoichiometry
MEMS
Raman spectroscopy
Energy dispersive spectroscopy
Refractive index
Waveguides
Carbon
Oxygen
Data storage equipment
titanium dioxide

Keywords

  • 3D nanopatterning
  • gas-assisted EBID
  • high-purity insulator
  • purification
  • titanium tetraisopropoxide (TTIP)

Cite this

Riazanova, A. V., Costanzi, B. N., Aristov, A. I., Rikers, Y. G. M., Mulders, J. J. L., Kabashin, A. V., ... Belova, L. M. (2016). Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide. Nanotechnology, 27(11), [115304]. https://doi.org/10.1088/0957-4484/27/11/115304

Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide. / Riazanova, A. V.; Costanzi, B. N.; Aristov, A. I.; Rikers, Y. G.M.; Mulders, J. J.L.; Kabashin, A. V.; Dahlberg, E. Dan; Belova, L. M.

In: Nanotechnology, Vol. 27, No. 11, 115304, 16.02.2016.

Research output: Contribution to journalArticle

Riazanova, AV, Costanzi, BN, Aristov, AI, Rikers, YGM, Mulders, JJL, Kabashin, AV, Dahlberg, ED & Belova, LM 2016, 'Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide', Nanotechnology, vol. 27, no. 11, 115304. https://doi.org/10.1088/0957-4484/27/11/115304
Riazanova AV, Costanzi BN, Aristov AI, Rikers YGM, Mulders JJL, Kabashin AV et al. Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide. Nanotechnology. 2016 Feb 16;27(11). 115304. https://doi.org/10.1088/0957-4484/27/11/115304
Riazanova, A. V. ; Costanzi, B. N. ; Aristov, A. I. ; Rikers, Y. G.M. ; Mulders, J. J.L. ; Kabashin, A. V. ; Dahlberg, E. Dan ; Belova, L. M. / Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide. In: Nanotechnology. 2016 ; Vol. 27, No. 11.
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