Gallium arsenide based micro-accelerometers

T. T. Vu, P. C. Nguyen, L. T. Vu, C. H. Nguyen, J. N.C. Vu, D. L. Polla, P. J. Schiller, S. Stevanovich, H. Y. Li, Y. Q. Yang, R. Harjani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Gallium arsenide (GaAs) based microaccelerometers are being developed for guidance and navigation subsystems, and various microsensor systems. The microaccelerometer is a microelectromechanical system (MEMs) micromachined on top of GaAs substrate or GaAs integrated circuits. The MEMS accelerometer is integrated on the same chip as the GaAs readout circuit and the GaAs analog to digital converter. Test and prototype chips are developed.

Original languageEnglish (US)
Title of host publicationMidwest Symposium on Circuits and Systems
Editors Anon
PublisherIEEE
Pages1111-1115
Number of pages5
Volume2
StatePublished - Dec 1 1997
EventProceedings of the 1997 40th Midwest Symposium on Circuits and Systems. Part 1 (of 2) - Sacramento, CA, USA
Duration: Aug 3 1997Aug 6 1997

Other

OtherProceedings of the 1997 40th Midwest Symposium on Circuits and Systems. Part 1 (of 2)
CitySacramento, CA, USA
Period8/3/978/6/97

Fingerprint Dive into the research topics of 'Gallium arsenide based micro-accelerometers'. Together they form a unique fingerprint.

Cite this