TY - JOUR
T1 - Functional materials integrated on III-V semiconductors
AU - Gatabi, Javad
AU - Lyon, Kevin
AU - Rahman, Shafiqur
AU - Caro, Manuel
AU - Rojas-Ramirez, Juan
AU - Cott-Garcia, Joelson
AU - Droopad, Ravi
AU - Lee, Byounghak
N1 - Publisher Copyright:
© 2015 Elsevier B.V. All rights reserved.
PY - 2015/11/1
Y1 - 2015/11/1
N2 - The integration of ferroelectric oxides on semiconductors has been achieved through the use of molecular beam epitaxy and solution spin coating. The oxide layers were determined to be single phase and crystalline and were oriented with the (1 0 0) along the growth direction. Epitaxial SrTiO3 and BaTiO3 buffer layers were grown on GaAs and Si using a unique MBE process for nucleation that suppressed the formation of interfacial oxide. The deposition of ferroelectric Pb(Zr)TiO3, on STO buffered Si and GaAs was carried out using solution spin coating. The nucleation of the oxide growth by solution spin coating was promoted by the crystallinity of the surface structure of the SrTiO3 buffer layer. Ab initio Density Functional Theory calculations were used to determine the interfacial structure and band alignments for the STO/GaAs and BTO/GaAs interfaces. Initial electrical characterization of the PZT grown on GaAs was determined by measuring the polarization versus electric field which suggests evidence of ferroelectricity.
AB - The integration of ferroelectric oxides on semiconductors has been achieved through the use of molecular beam epitaxy and solution spin coating. The oxide layers were determined to be single phase and crystalline and were oriented with the (1 0 0) along the growth direction. Epitaxial SrTiO3 and BaTiO3 buffer layers were grown on GaAs and Si using a unique MBE process for nucleation that suppressed the formation of interfacial oxide. The deposition of ferroelectric Pb(Zr)TiO3, on STO buffered Si and GaAs was carried out using solution spin coating. The nucleation of the oxide growth by solution spin coating was promoted by the crystallinity of the surface structure of the SrTiO3 buffer layer. Ab initio Density Functional Theory calculations were used to determine the interfacial structure and band alignments for the STO/GaAs and BTO/GaAs interfaces. Initial electrical characterization of the PZT grown on GaAs was determined by measuring the polarization versus electric field which suggests evidence of ferroelectricity.
KW - Barium titanate
KW - Density Functional Theory
KW - Ferroelectric oxides
KW - Lead zirconium titanate
KW - Molecular beam epitaxy
KW - Solution spin coating
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U2 - 10.1016/j.mee.2015.04.050
DO - 10.1016/j.mee.2015.04.050
M3 - Article
AN - SCOPUS:84928403682
SN - 0167-9317
VL - 147
SP - 117
EP - 121
JO - Microelectronic Engineering
JF - Microelectronic Engineering
ER -