Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly

M. W. Jang, M. Lu, T. Cui, S. A. Campbell

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

This paper demonstrates fixed-beam switches using well-aligned composite SWNT membranes, which were prepared by dielectrophoretic process with Layer-by-Layer self-assembly. The measured DC pull-in voltages ranged from 0.9 V to 4.8 V, depending on the length of switches. AC measurements indicate a switching delay as low as 600 psec for 300 nm beams. This new SWNT composite membrane switch is promising for a variety of applications to high-end nanoelectronics and high- performance MEMS/NEMS.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherIEEE Computer Society
Pages912-915
Number of pages4
ISBN (Print)9781424441938
DOIs
StatePublished - Jan 1 2009
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: Jun 21 2009Jun 25 2009

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country/TerritoryUnited States
CityDenver, CO
Period6/21/096/25/09

Keywords

  • Aligned composite SWNT membrane
  • Dielectrophoretic process
  • Fixed-beam switch
  • Layer-by-layer self-assembly

Fingerprint

Dive into the research topics of 'Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly'. Together they form a unique fingerprint.

Cite this