@inproceedings{1997b90bd2aa4601a347e2704a1eb7a0,
title = "Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly",
abstract = "This paper demonstrates fixed-beam switches using well-aligned composite SWNT membranes, which were prepared by dielectrophoretic process with Layer-by-Layer self-assembly. The measured DC pull-in voltages ranged from 0.9 V to 4.8 V, depending on the length of switches. AC measurements indicate a switching delay as low as 600 psec for 300 nm beams. This new SWNT composite membrane switch is promising for a variety of applications to high-end nanoelectronics and high- performance MEMS/NEMS.",
keywords = "Aligned composite SWNT membrane, Dielectrophoretic process, Fixed-beam switch, Layer-by-layer self-assembly",
author = "Jang, {M. W.} and M. Lu and T. Cui and Campbell, {S. A.}",
year = "2009",
month = jan,
day = "1",
doi = "10.1109/SENSOR.2009.5285936",
language = "English (US)",
isbn = "9781424441938",
series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "IEEE Computer Society",
pages = "912--915",
booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",
}