@inproceedings{fa6d0fda0f024700bf948f15a3a98e59,
title = "Fracture of atomic layer deposited nanolaminate films",
author = "Moody, {N. R.} and Jungk, {J. M.} and Mayer, {T. M.} and Wind, {R. A.} and George, {S. M.} and Gerberich, {W. W.}",
note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 16th European Conference of Fracture ; Conference date: 03-07-2006 Through 07-07-2006",
year = "2006",
doi = "10.1007/1-4020-4972-2_343",
language = "English (US)",
series = "Fracture of Nano and Engineering Materials and Structures - Proceedings of the 16th European Conference of Fracture",
publisher = "Kluwer Academic Publishers",
pages = "693--694",
editor = "E.E. Gdoutos",
booktitle = "Fracture of Nano and Engineering Materials and Structures - Proceedings of the 16th European Conference of Fracture",
}