Formation of highly uniform silicon nanoparticles in high density silane plasmas

Z. Shen, T. Kim, U. Kortshagen, P. H. McMurry, S. A. Campbell

Research output: Contribution to journalArticlepeer-review

44 Scopus citations

Abstract

A study was performed on the formation of highly uniform silicon nanoparticles in high density silane plasmas. The transmission electron micrographs indicated that the addition of hydrogen decreased the particle density. The results showed that at higher dilution ratios, polycrystalline particles were obtained.

Original languageEnglish (US)
Pages (from-to)2277-2283
Number of pages7
JournalJournal of Applied Physics
Volume94
Issue number4
DOIs
StatePublished - Aug 15 2003

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