Formation of highly uniform silicon nanoparticles in high density silane plasmas

Z. Shen; T. Kim; U. Kortshagen; P. H. McMurry; S. A. Campbell

doi:10.1063/1.1591412

Formation of highly uniform silicon nanoparticles in high density silane plasmas

Z. Shen, T. Kim, U. Kortshagen, P. H. McMurry, S. A. Campbell

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Abstract

A study was performed on the formation of highly uniform silicon nanoparticles in high density silane plasmas. The transmission electron micrographs indicated that the addition of hydrogen decreased the particle density. The results showed that at higher dilution ratios, polycrystalline particles were obtained.

Original language	English (US)
Pages (from-to)	2277-2283
Number of pages	7
Journal	Journal of Applied Physics
Volume	94
Issue number	4
DOIs	https://doi.org/10.1063/1.1591412
State	Published - Aug 15 2003

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10.1063/1.1591412

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title = "Formation of highly uniform silicon nanoparticles in high density silane plasmas",

abstract = "A study was performed on the formation of highly uniform silicon nanoparticles in high density silane plasmas. The transmission electron micrographs indicated that the addition of hydrogen decreased the particle density. The results showed that at higher dilution ratios, polycrystalline particles were obtained.",

author = "Z. Shen and T. Kim and U. Kortshagen and McMurry, {P. H.} and Campbell, {S. A.}",

year = "2003",

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doi = "10.1063/1.1591412",

language = "English (US)",

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journal = "Journal of Applied Physics",

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T1 - Formation of highly uniform silicon nanoparticles in high density silane plasmas

AU - Shen, Z.

AU - Kim, T.

AU - Kortshagen, U.

AU - McMurry, P. H.

AU - Campbell, S. A.

PY - 2003/8/15

Y1 - 2003/8/15

N2 - A study was performed on the formation of highly uniform silicon nanoparticles in high density silane plasmas. The transmission electron micrographs indicated that the addition of hydrogen decreased the particle density. The results showed that at higher dilution ratios, polycrystalline particles were obtained.

AB - A study was performed on the formation of highly uniform silicon nanoparticles in high density silane plasmas. The transmission electron micrographs indicated that the addition of hydrogen decreased the particle density. The results showed that at higher dilution ratios, polycrystalline particles were obtained.

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DO - 10.1063/1.1591412

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EP - 2283

JO - Journal of Applied Physics

JF - Journal of Applied Physics

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Formation of highly uniform silicon nanoparticles in high density silane plasmas

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