Focused nanoparticle-beam deposition of patterned microstructures

F. Di Fonzo, A. Gidwani, M. H. Fan, D. Neumann, D. I. Iordanoglou, J. V.R. Heberlein, P. H. McMurry, S. L. Girshick, N. Tymiak, W. W. Gerberich, N. P. Rao

Research output: Contribution to journalArticlepeer-review

91 Scopus citations

Abstract

A method was developed for fabricating nanocrystalline microstructures. This method involves synthesizing nanoparticles in a thermal plasma expanded through a nozzle, and then focusing the nanoparticles to a collimated beam by means of aerodynamic lenses. High-aspect-ratio structures of silicon carbide and titanium were deposited on stationary substrates, and lines and two-dimensional patterns were deposited on translated substrates. Linewidths equalled approximately 50 μm. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows size selection of the particles that are deposited.

Original languageEnglish (US)
Pages (from-to)910-912
Number of pages3
JournalApplied Physics Letters
Volume77
Issue number6
DOIs
StatePublished - Aug 7 2000

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